판매용 중고 LAM RESEARCH TCP 9600 SE #9177741

Metal etcher system, 8" Software version: Version E1.5-released Software envision: 1.5 With light pen Process METAL ETCH Platform type: Rainbow stand-alone TCP 9600SE Wafer shape: SNNF Main chamber: TCP 9600SE Enterance loadlock: Standard entrance loadlock chamber Exit loadlock: DSQ Chamber with 8″ paddle APM Chamber: (2) APM DI Nozzles, N2 splayer Load station: Belt type shuttle Indexers: 38A Hine indexers Wafer alinger: Universal Upper chamber body: TCP 9600se Gap: 6CM Upper chamber fixed gap Electrostatic chuck type: 8″ Bi-polar ESC Turbo pump: ALCATEL 1300M with Controller Pressure manometer: Millipore 100mT Pressure controller: VAT Gate valve PM7 Pressure controller End point: Detector heated port With dual channels (261.8nm/ 703nm) Matchers: Auto tuner T Matcher for upper (8) Turn RF coil matcher for Bias Generators on board: AE-1250 For upper and bias chamber Helium back side cooling 50sccm UPC (Unit 8130) ADIO Boards Main board ESC Power supply: (16) Channel heater controllers Chamber: Auto tune DSQ strip module Funnel: 8″ Quartz funnel Paddle: 8″ Heated Paddle Hardware configuration: Pressure controller: AC2 Pressure controller Pressure manometer: MKS 10TORR WVDS: Auto fill WVDS controller WVDS Temperature controller: Auto temp controller Cooling fan hinged DSQ stripper With high flow cooling fan Vapor controller: TYLAN 500sccm H2O Controller RF Tuner: (8) Tunes RF Coil matcher (DIP-PCB RF Tuner) RF Generator on board: AE-1250 Heater controller: 853-015771-001 Spinner: 853-015759-102 DI Water nozzles: Hot Cold high water flow nozzles Line 1: Gas CL2 Line 2: Gas BCL3 Line 3: Gas Ar MFC Size: 200sccm (Unit 1660) Line 4: Gas CF4 Line 5: Gas N2 Line 6: Gas O2 Line 7: Gas CF4 Line 8: Gas H20 EMCP*01 Part list: (1) Transporter Exit loadlock: DSQ Chamber with 8″ Paddle (1) Transporter APM Chamber: (2) APM DI nozzles, N2 splayer (1) Transporter Wafer alinger universal (1) Main chamber Electrostatic chuck type: 8″ Bi-polar ESC (1) Main chamber Pressure manometer: Millipore 100mT (1) Main chamber End point detector: Heated port with dual channels (261.8nm/ 703nm) (1) Main chamber Matchers: Auto tuner/ T Matcher for upper, (8) Turn RF coil matcher for Bias (2) Main chamber Generators on board: AE-1250 For upper and bias chamber (1) Main chamber Helium back side: Cooling 50sccm UPC (Unit 8130) (8) Main chamber ADIO Boards (1) Main chamber Main board (1) Main chamber ESC Power supply (2) Main chamber (16) Channel heater controllers (1) PLL Chamber Paddle: 8″ Heated paddle (1) PLL Chamber WVDS Auto fill WVDS controller (1) PLL Chamber Vapor controller: TYLAN 500sccm H2O Controller (1) PLL Chamber RF Generator on board: AE-1250 (1) PLL Chamber Heater controller: 853-015771-001 (1) PLL Chamber Spinner 853-015759-102 Currently warehoused 2000 vintage.