판매용 중고 LAM RESEARCH Rainbow 4520i #9114147

Etcher, 8" SMIF Isotropic chamber (26) Slots Chamber: Single chamber with variable gap electrode Main chamber: (6) Gases RF Generator model: PDW-2200 RF Power supply: 2.2 kW & 400 kHZ Isotropic chamber: (3) Gases RF Generator model : RFG1250 RF Power supply: 1.2 kW & 13.56 MHz Automatic match system (LOFAT) ISO Chamber matcher (AE Matcher AZX 10) Electrode temperature unit interface Endpoint detector: Monochronometer ASS’Y ELCTD,ESC,8”,SEMI: 839-440462-308 (High resist ESC) Semi open loop back HE cooling OBITAL Gas box configuration XLL Wafer detector sensor Remote interface Viton O-ring N2 Ballast Kit Standard clean gas box Remote AC control box Wafer transfer: Cassette to cassette (Hine 38A indexer) Pick & place single wafer transport with non contact wafer alignment & flat zone orientation System controller: ENVISION E1.5.2 Control system with LCD Monitor Pressure control: Automatic pressure control AC-2: Main chamber / Isotropic chamber Process gas configuration: Standard clean gas box with 9 MFC's for reaction Make Model Gas Full scale MILLIPORE FC-2900V Ar 1000 MILLIPORE FC-2900V CF4 100 MILLIPORE FC-2900V CHF3 100 MILLIPORE FC-2900V He 1000 MILLIPORE FC-2900V O2 500 MILLIPORE FC-2900V N2 100 MILLIPORE FC-2900KZ NF3 1000 MILLIPORE FC-2900V He 500 MILLIPORE FC-2900V O2 100 Main frame / System controller: (2) Indexers line 38A (853-012600-101, 853-012600-102) ISO Chamber top gatch (AE Matcher AZX 10) 660-021964-001 Process chamber: ESC 8" Notch, ceramic 839-440462-308 Electrode, silicon, hi temperature, polish, 8" 839-011907-913 Remote frame: Chiller: SMC INR-497 Pump: AA70W (2) AA40W Power requirements: Etcher: 208 V, 3 Phase, 30 A, 5 Wires RF Cart: 208 V, 3 Phase, 50 A, 5 Wires 1995 vintage.