판매용 중고 LAM RESEARCH Rainbow 4520 #9280619

Oxide etcher, 6" Gases: Gas 1 / AR Gas 2 / CF4 / SF6 Gas 3 / CHF3 Gas 4 / HE Gas 5 / O2 UPC HE Standard gas box Calibration Gas weldment polish Bottom gas panel exhaust Wafer transfer: Open cassette exit, 6" Entrance load lock wafer holder Hinge 38A receiver / Sender indexer Belt driven load station Standard load station shuttle spatula AC power: Fuses for AC/DC power box AC Input power supply: 208 V, 3 Q, 5 W, 30 A RF Power supply: 2.2 kW, 400 kHz Chamber configuration: Envision system with CRT Bulkhead system mount Chamber with variable gap electrode Automatic match system Electrode temperature unit interface Endpoint detector: Monochromatic ESC Chuck and module Viton O-ring all change Standard clean gas box Pressure control system: APC Controller Throttle valve Isolation valve open / Close type Upper and lower electrode temperature control: Chiller type: 2080 TCU Dual system Vacuum system Main chamber: EDWARDS QDP80+QMB250 Pump / IH600 Load lock chamber: EDWARDS QDP80 Dimension and facility Physical dimensions Power requirements Exhaust requirements Cooling water Nitrogen Compressed air: CDA / N2.