판매용 중고 LAM RESEARCH Rainbow 4420B #293712817

Etcher, 8" Gas box (8 MFC) Open cassette type: HINE 38A E-Chuck CRT Monitor Remote monitor Fore-Line Process chamber Gas box CPU type: Pentium 133 MHZ Chamber: ESC, 8" Focus ring Face-upper ring electrode, ceramic Upper electrode Orifice filler, ceramic Upper baffle Lower baffle View window Cathode clamp ring Lifter wafer 4 pin new type Ring colling electrostaic Part number / Description 716-011009-001 / View window 853-001983R005-R / Endpoint dection 810-017086-010 / ESC power supply 853-011054-001 / MKS Chamber manometer 797-093824-203 / Unit pressure control 8130 he sccm 853-031764R-001 / Lift pin cylinder 796-006238-001 / Throttle valve controller 853-013541-002 / Assy throttle valve ADVANCED ENERGY RFG 1250 RF Generator: RF Power cord RF Cable TCU Signal cable TCU Channel to interconnect Part number / Description 5027-000-3 / ADVANCED ENERGY PDX-1250 RF Generator 853-015130-002 / Assy RF Match gear driven 810-017003-001 / PCB / DIP Transfer: Part number / Description 853-012100-003-C-230S / Robot (ELL and XLL) 853-012600-101 / Load index assy 853-029295-101 / Unload index assy 853-012261-001-4-230D / Inner door 853-140013-001-1-230 / Outer door 605-017016-100 / Assy stepper PCB Motor drive 853-029462-001 / XLL Wafer sensor VME PCB: Part number / Description 810-017034-005 / Assy PCB VME 68030 810-017031-004 / ASSY PCB ADIO-AO 810-017038-002 / SIO PCB 810-017388-003 / Ethernet address PCB Power supply: Part number / Description 660-091820-001 / DC Power supply: +24V 660-091821-001 / DC Power supply: 5V / 12V / 15V / 24V.