판매용 중고 LAM RESEARCH Rainbow 4420 #293609830

Etcher, 6" (8) MFC Cassette type: Open cassette, 6"(Standard) LCD Remotte monitor Chamber: Part number / Description 718-092326-061 / ESC 716-028249-064 / Focus ring 716-011540-001 / Face-upper ring electrode, ceramic 715-011531-015 / Upper electrode 716-011570-001 / Orifice filler, ceramic 715-011753-001 / Upper baffle 715-011913-080 / Lower baffle 716-011009-001 / View window 715-011535-001 / Cathode clamp ring 715-011622-201 / Lifter wafer 4 pin new type 715-028532-002 / Ring colling electrostaic 853-540066-005 / Endpoint dection 853-025054-002 / ESC power supply 796-092338-005 / MKS Chamber manometer 797-008571-103 / Unit pressure control 8130 he 50 sccm 853-031764-002 / Lift pin cylinder 796-006238-001 / Throttle valve controller 853-013541-002 / Assy throttle valve RF Generator: ADVANCED ENERGY PDX-1250 RF Generator, part number: 660-024637-003 Assy RF Match gear driven, part number: 853-015130-002 PCB / DIP, part number: 810-017003-004 RF Power cord, 60 feet RF Cable, 65 feet TCU Signal cable,60 feet TCU Channel to interconnect, 60 feet Transfer: GAP calibration tool Transfer calibration tool Part number / Description 853-012123-001 / Robot (ELL and XLL) 853-012601-001 / Load index assy 853-012600-102 / Unload index assy 853-012200-002 / Inner door 853-012200-002 / Outer door 605-017016-100 / Assy stepper PCB Motor drive 853-029462-001 / XLL Wafer sensor VME PCB: Part number / Description 810-017034-005 / Assy PCB VME 68030 810-017031-004 / ASSY PCB ADIO-AO 810-017038-002 / SIO PCB 810-017388-003 / Ethernet address PCB Gases: CL2 500 SCCM SF6 200 SCCM C2F6 200 SCCM HE 500 SCCM HBR 100 SCCM HE 50 SCCM CHF3 20 SCCM O2 10 SCCM Power supply: Part number / Description 660-091820-001 / 660-091820-003 / DC Power supply: +24V 660-091821-001 / 660-091821-003 / DC Power supply: 5V / 12V / 15V / 24V Manuals included.