판매용 중고 LAM RESEARCH / ONTRAK Kiyo 45 #9375193

Metal etcher (2) Chambers (PM2, 3) With (2) Strips (PM1, 4) MF (EFEM/TM): Platform type: V2 (3) BROOKS 002-7200-32 Load ports BROOKS 138150 ATM Robot BROOKS 401600-201-0002-FRU TM Robot EDWARDS EPX180N IPump (Ontool pump) PM Module (PM1,2,3,4): (3) MOTORORA CPU (2) LAM RESEARCH 810-046015-009 VIOP (2) LAM RESEARCH 810-099175-103 VIOP (2) LAM RESEARCH 605-707109-001 Engenuities (2) LAM RESEARCH 605-707109-012 Engenuities (3) LAM RESEARCH 810-495659-303 ESC Power supplies OCEAN OPTICS 685-801852-005 OES OCEAN OPTICS 685-069171-002 OES MKS 797-004456-003 VODM MKS 797-00456R005 VODM (2) MKS AX7695 Revolution (2) LAM RESEARCH 839-014090-374 ESC Gas configuration: IGS Gas box (17) Gas lines (20) HORIBA SEC-Z313M Gas box MFC (3) HORIBA SEC-Z719MGX Gas box MFC (9) HORIBA D219-SCT Gas box MFC (2) MKS 649A-25014 He UPC Strip gas: (2) HORIBA SEC-Z313M Gas 3 Ar(2000) (2) HORIBA SEC-Z313M Gas 2 O2(5000) (2) HORIBA SEC-Z313M Gas 1 N2(1000) Components: (2) MKS E28B-23747, 31802 Process gauges (2) MKS 625A-14059 Chamber gauges HPS 109070019-CE TM vacuum gauge (2) TELEDYNE HPM2002-OBE-LM Air lock vacuum gauges (2) EDWARD STP-XA2703CV Turbo pumps (2) EDWARD SCU-1500 Turbo pump controllers RF Gen / Matcher: APEX APEX1513 BIAS RF Generator APEX PARAMOUNT1513 BIAS RF Generator APEX APEX1513 TCP RF Generators APEX APEX2013 TCP RF Generators LAM RESEARCH 832-038915-001 BIAS RF Matcher LAM RESEARCH 832-038915-203 BIAS RF Matcher LAM RESEARCH 853-034908-200 TCP RF Matcher LAM RESEARCH 853-043759-401 TCP RF Matcher LAM RESEARCH 834-036619-011 BIAS RF Cable LAM RESEARCH 684-111962-001 BIAS RF Cable LAM RESEARCH 834-036619-020 TCP RF Cable LAM RESEARCH 834-036619-021 TCP RF Cable 2007 vintage.