판매용 중고 LAM RESEARCH / ONTRAK 2300 Exelan Flex #9119643

Dielectric etcher, 12" Process: OX Software Revision: 1.7.2 SP2 HF4 CST2 Factory Automation: OHT PIO Sensor AMHS: AMHS - OHT Carrier: FOUP Interface: 3 carrier stage Online Connection: GEM / CIM JGJ Hardware Interface : Ethernet 100Base-Tx Utility Box: Air/AR2500(SMC), N2/SQ-420E He/SQMICRO(VERIFLO) Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD) Utility Box: Pressure Gauge : Bourdon Gauge Platform Type: Version 2 UPS on system: Yes Earth Leakage Breaker Gas Box: Transport Module, GIB for 16 lines IGS GBX Signal Tower: Red/Orange/Green/Blue EMO: (2) Front, (6) Rear Foreline: Not Heated Sub-panel: Dual Drop Sub-panel Interconnect Cables: TM to sub-panel, 50 ft Pump to TCU: 50 ft TCU to PM: 50 ft PM to Pump Interconnect: 50 ft Inter Lock: Gas Box Door Inter Lock: External Support Remote Units Chiller Lower: ATS DEX 20A Coolant: FC3283 Chiller Hose: 5/8 ID Braided Stainless Flex RF Generator 2 MHz: Including RF Cable Tru-8743-07 RF Generator 27 MHz: Including RF Cable Tru-8743-07 RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFC Wafer ID Reader: WIDS Bottom Read Carrier ID Reader: Asyst RF Advantag EIM Server: EIM Server-One EIM server per 8 frames Hardware Configuration Process Ch.1,2,3,&4: 2300 Exelan Flex Wafer Input Buffer Station: KIT,JIT<OPT<25 STATION BUFFER,300MM Endpoint type: Optical Emission Spectroscopy ESC type: Dual Zone/Flex Bipolar Focus ring: Hot Edge, Si High-conductance Wap Ring: 4 Ring Gap: 2.34 cm TMP: ALCATEL ATH,1600M Dry Pump: IH600 Transfer Module Backing Pump: EPX with N2 Gas Module Pressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 Torr Pressure Monitor: C/M ( Service Monitor ) 625A-14059 10 Torr Pressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 Torr Pressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001 Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14 Upper Electrode: Heated Constant Temperature Control Coolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower Electrode O-Rings: FluoroSilicone Chamber Isolation Valve: Barrier Seal Door Wafer Lift Mechanism: Direct Drive Gas Position Gas line 1-C4F8 50 sccm- AERA FC-D780CU Gas line 2-O2 50 sccm- AERA FC-D780CU Gas line 3-CHF3 100 sccm-AERA FC-D780CU Gas line 4-CF4 200 sccm-AERA FC-D780CU Gas line 5-30% O2/HE 100 sccm-AERA FC-D780CU Gas line 6-C4F6 50 sccm- AERA FC-D780CU Gas line 7-CH2F2 50 sccm-AERA FC-D780CU Gas line 8-CF4 1000 sccm- AERA FC-D780CU Gas line 9-H2 1500 sccm- AERA FC-D780CU Gas line 10-AR 1000 sccm- AERA FC-D780CU Gas line 11-N2 1000 sccm- AERA FC-D780CU Gas line 12-O2 3000 sccm- AERA FC-D780CU Tuning Gas: 30% O2/HE 50 sccm-AERA FC-D780CU Gas Box Configuration Purge: N2 (Process Grade N2) Filter: Final gas : Mykrolis Gas Box Inlet Option: Regulated Inlet Gas Panel Non-standard PM/GB Feature: Enhanced gas box with 12 gas lines. Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readout Regulator: SQMICRO (VERIFLO) Piping: Single Contained Hasteloy Piping (Gas box to Final valve & Exhaust through Gas box) Final Pressure Switch: Absolute Pressure switch 400 torr Lam P/N 796-002833-003 Process Kit Config Upper Outer Electrode: ASSY,ELCTD,OUTER,.18 STEP,300M Upper Inner Electrode: ASSY,ELCTD,INNER,TC,300MM Quartz WAP Ring: RING,WAP,Twist Lock,17IN,300MM Quartz Generic Ring: RING,WAP,QTZ Gas Feed Ring: Ring, Ptn, Gas Feed, Dual Zone Dual Zone ESC: ESCASSY,DZ CLG,2 FNSH,300MM ESC Bolts: ESC Bolts - 10-32 x1.125 lng, vented Edge Ring Cover (In): COV,H/E RING,QTZ Focus Cover Ring: B,FOCUS R CVR,DFC 300MM Hot Edge Ring: RING,HOT EDGE,.195 HGT,SI,DUAL ZONE ESC Edge Ring Cover (Out): RING,COVER,OUTER,GND Fixed Coupling Ring: RING,TOP,ADJ,CPLG,2300,300MM,D Ground Shield: SHLD,GND,300MM,2300 Liner: LINER/SPCR,EXT GND RING,2.0CM GAP 4-ringer Hangers: HANGER,4R,.025,.08-.08-.12-.12,.010FW Retainer Spring: ASSY RETAINER SPRING 1/4-20 Peek Nut: NUT,1/4-20,VIRGIN PEEK Peek Clocking Washer: WSHR,FL,PEEK,.263IDX.682ODX.06THK Peek Sleeve: SLV,ADPTR,SLIP-ON,SELFCNTR,V PEEK 0.010" Peek Pad: PAD,R,CONF,.010THK.300MM 2008 vintage.