판매용 중고 LAM RESEARCH Alliance A6 9400 DFM #198258

Poly Etcher, 8" (3) Chamber modules to include: (1) Model 9400PTX (2) Model 9400DFM (3) LAM Enhanced Research Lab Gas Boxes (1) Control Rack with Noah Precision Models PSC-8000 and PSC-4400 Modules (2) Edwards Dry Pump Systems Software: Envision Platform: Alliance A6 Process: poly Process modules: DFM Gas box style: external orbital gas box individual door Interface: front and rear Main frame: though the wall bulkhead Transport module spec: Robot: Mag 7 End effector: standard stainless steel Load lock: Brooks automatic Station 6: Aligner Process module 1: Process: poly etch Process module: DFM Turbo: Edwards 1600 seiko seiki Manometer: heated single 10 torr manometer Vat valve: vat 65 heated Rf match: standard TCP extended range match Coil: standard 8" coil Chuck: E-chuck standard bi-polar Rf generator: Halo 1250 Endpoint: verity end point No interferometer Pump ballast Aov85: yes Backside He manometers present Gas lines: non heated Process module 2 Process: poly etch Process module: DFM Turbo: Alcatel 1600m Manometer: heated single 10 torr manometer Vat valve: vat 65 heated Rf match: standard tcp exteneded range match Coil: standard 8" coil Chuck: E-chuck standard bi-polar Rf generator: Halo 1250 Endpoint: verity end point No interferometer Pump ballast Aov85: yes Backside He manometers: present Gas lines: non heated Process module 3 Process: poly etch Process module: DFM Turbo: Alcatel 1600m Manometer: heated single 10 torr manometer Vat valve: vat 65 heated Rf match: standard tcp exteneded range match Coil: standard 8" coil Chuck: E-chuck standard bi-polar Rf generator: Halo 1250 Endpoint: verity end point No interferometer Pump ballast Aov85: yes Backside He manometers: present Gas lines: non heated Pumps Edwards IQDP 80/500 Chiller Noah solid state Gas box Mfc Unit series with metal seals Includes: Gib options STD Stacking kit Gas box mounting location: remote Quick clean kit TCU hosing: 50ft TCU configuration: Noah solid state Operating temperature: 60 - 80c Tm exhaust: upper 2002 vintage.