판매용 중고 LAM RESEARCH Alliance 6.0 TCP 9400 PTX #9024652

Dry etcher, 8" CASS NEST PLASTIC 8" Wafer Shape SNNF (Semi Notch No Flat) SMIF Interface NO System Information: Platform type ALLIANCE 6.0 Process chamber qty 3 Software version A2.2-018 SECS/ GEM yes Chamber Location / Type / Current process: Position 1 (PM1) TCP9400PTX / Poly etch Position 2 (PM2) TCP9400PTX / Poly etch Position 3 (PM3) TCP9400PTX / Poly etch Position 4 (PM4) none Etch Chamber: Chamber type TCP9400PTX Turbo pump EDWARDS STP-A1303CV80 Turbo N2 fixed or MFC Type Fixed Helium UPC UPC-8130 Endpoint detector none Pendulum valve model VAT 65046-PH52-ADE Chamber Manometer MKS E29B-23813 Turbo Manometer MKS 625A-14375 Foreline Manometer MKS 625A-14059 Helium Manometer yes Top RF generator model AE / 3155059-026 Bottom RF generator model AE / 3155059-028 (RFG1250 HALO) TCP Match yes Bias Match yes TOP RF Sense Box yes Bias RF Sense Box yes Auto Tune Board yes DIP Board yes VCI Connected No Gas configuration and setup: Chamber volume used for gas cal 36200 ml Gas Box: type Extended capability gas box – Phase II gas box qty 3 (stacking) manual valve yes on each line pressure gauge yes on each line regulator yes on each line filter yes on final line Gas Panel Pallet: gas line qty with N2 purge line 8 gas line qty without N2 purge line 0 MFC type UFC-1661 / UFC-1660 / UFC-8160 Gas line (gas name, MFC size) PM1 line 1 O2 100 / UFC-1660 line 2 NF3 100 / UFC-1661 line 3 He 200 / UFC-1660 line 4 CF4 200 / UFC-1660 line 5 SO2 100 / UFC-1660 line 6 SF6 200 / UFC-1660 line 7 Ar 200 / UFC-1660 line 8 none PM2 line 1 O2 100 / UFC-1660 line 2 NF3 100 / UFC-1661 line 3 He 200 / UFC-1660 line 4 CF4 200 / UFC-1660 line 5 SO2 100 / UFC-1660 line 6 SF6 200 / UFC-1660 line 7 Ar 200 / UFC-1660 line 8 none PM3 line 1 O2 100 / UFC-1661 line 2 NF3 100 / UFC-1661 line 3 He 200 / UFC-1661 line 4 CF4 200 / UFC-1660 line 5 SO2 100 / UFC-1660 line 6 SF6 200 / UFC-1660 line 7 Ar 200 / UFC-1660 line 8 none Mainframe: Loadlock Dual VCE Loader / Manual Door open Robot type BROOKS MagnaTrain 7 (with Dual aluminum blade) EMO button front, side Signal tower (front) green, yellow, red Remotes: RPM Qty 1 EMO button yes Line frequency and voltage 208VAC 3ph Remote UPS interface yes (105V 1ph) UPS yes System monitor display 1 (front) Heat Exchanger Type: For Cathode NOAH PRECISION, LLC / Model 3300 (-20 ~ +90degC) qty 3 Pumps Type: Transfer Module EBARA A70W (not included in scope, needed to confirm) PM1 EBARA A30W (not included in scope, needed to confirm) PM2 EBARA A30W (not included in scope, needed to confirm) PM3 EBARA A30W (not included in scope, needed to confirm) Gas Scrubber: qty 1 Type EBARA GTE-3-0WVT (not included in scope, needed to confirm) 1998 vintage.