판매용 중고 LAM RESEARCH A6 9600 PTX #201020

Etcher Process: metal SMIF type: API Chamber type: PTX Chambers: (2) PM, (2) Strip Automation online component: SECS I/II, SECSGEM Chamber config Process module 1: Focus ring: 716-460216-002 Quartz plate: 716-000941-001 Process module 2: Esc: 718-094523-281 Liner, chamber, vat 65, Trnsn manf: 839-495013-002 Liner, chamber, trnsn manf, adptr: 715-495014-001 Liner, chamber, trnsn manf: 714-495015-001 Liner, chamber, al, alli, bsr, 9600XX: 715-330825-007 Top quartz: 716-330891-002 Insul, esc, 9600XX: 716-330915-001 Pl, sh hd, cer, 21 hole, 9600PTX: 716-330892-007 Ring, gnd, chamber, bsr, ac cpld: 715-330889-002 Edge ring: 716-330045-281 Uniformity ring: 716-331051-002 Process module 3: Esc: 718-094523-281 Liner, chamber, vat 65, Trnsn manf: 839-495013-002 Liner, chamber, trnsn manf, adptr: 715-495014-001 Liner, chamber, trnsn manf: 714-495015-001 Liner ,chamber, al, alli, bsr, 9600XX: 715-330825-007 Top quartz: 716-330891-002 Insul, esc, 9600XX: 716-330915-001 Pl, sh hd, cer, 21 hole, 9600PTX: 716-330892-007 Ring, gnd, chamber, bsr, ac cpld: 715-330889-002 Edge ring: 716-330045-281 Uniformity ring: 716-331051-002 Process module 4: Focus ring: 716-460216-002 Quartz plate: 716-000941-001 EPD Channel: end point filter box for PM 1 and PM 2 Channel (nm): 853-540066-011 703/261nm, 853-540066-011 703/261nm Gas and B/H module (PM 1, 2, 3, 4 respectively) Gas line qty (analog): 3, 8, 8, 3 Gas box model (analog): all universal Gas 1: O2 5000, BCl3 200, BCl3 200, O2 5000 Gas 2: N2 1000, O2 1000, O2 1000, N2 1000 Gas 3: H2O 1000, Cl2 400, Cl2 400, H2O 1000 Gas 4: n/a, N2 200, N2 200, n/a Gas 5: n/a, CF4 100, CF4 100, n/a Gas 6: n/a, Ar 200, Ar 200, n/a Gas 7: n/a, N2 20, N2 20, n/a Gas 8: n/a, CHF3 50, CHF3 50, n/a Helium pressure control unit: n/a, UPC-1300, UPC-1300, n/a VAC (PM 1, 2, 3, 4 respectively) Turbo pump: n/a, ATH-1600, ATH-1600, n/a Turbo pump controller: n/a, ACT1300M/1600M, ACT1300M/1600M, n/a Dry pump (TM and VCE): all single pump Chamber manometer: MKS 10Torr, MKS 0.1Torr, MKS 0.1Torr, MKS 10Torr Turbo manometer: n/a, MKS 10Torr 625A, MKS 10Torr 625A, n/a Foreline manometer: all MKS 10Torr 625A Pressure control valve: VAT64, Pendulum VAT65, Pendulum VAT65, VAT64 VAT controller: all software 65PM.3E.20 Temperature control (PM 1, 2, 3, 4 respectively) Temperature control system: all 16 channel Chiller type: 1 CH TCU, n/a, n/a, 1 CH TCU RF generator: UPPER:RFDS1250/LOW:RFDS1250-HALO, n/a, n/a, UPPER:RFDS1250/LOW:RFDS1250-HALO Match: (L-853-330951-021)/(U-853-032294-002), Stripper SmatchMatch, Stripper SmatchMatch, (L-853-330951-021)/(U-853-032294-002) TR system Platform: A6 Light tower: standard 4 light Robot type: Brooks Mag-7 Arm type: dual arm Wafer handling interface: Kalrze end effector TM cover lift arm with PRK function VCE inspection: lip seal Computer system: PC Software version 2.2 Remote UI Standard power 1996 vintage.