판매용 중고 LAM RESEARCH 2300 Versys #9161243

Metal etcher, 12" EFEM: Part no Load port (1): 002-7200-21 Load port (2): 002-7200-32 Atm robot: No Wafer alignment: 03121001 Power control rack: AC Rack: Model no: 2300 Vintage: 2003 Rear user interface monitor: Yes Robot controller: No P/C: Yes Vacuum TM: Airlock (Right): Yes Airlock (Left): Yes VTM Robot: No TM / PM Facility lines: Yes Slop valve load lock (Right): Yes Slop valve load lock (Left): Yes Vacuum TM: Part No Inner door Assy (Air lock Right): 853-007861-231 Inner door Assy (Air lock Left): 853-007861-003 Inner door Assy (PM2): 853-007859-002 Inner door Assy (PM3): 853-007859-212 Inner door Assy (PM4): 853-007859-212 Process module: PM2: 2300 Poly: Model no: Metal 2300 Vintage: 2003 TCP Match: Yes TCP Coil: Yes Bias match: Yes Process manometer: Model no: E28B-23747 Range: 0.1 Torr Process manometer valve assy: Yes AC/SSR Box: Yes Fore line manometer: Yes Turbo pump fore line isolation valves, manometers: Yes Turbo pump: Yes (ATM2300M) VME Assembly: Yes VAT Pendulum valve: Yes Fore line Assy: Yes He cooling / Lift box: Yes Motor stepper board: Yes RF Cart: PM2 Turbo controller: Yes Generator (TCP): Yes (660-900984-008) Generator (BIAS): Yes (3155059-026) PM1: Gas box (GIB): Yes MFC 1_CL2: Yes MFC 2_HBR: Yes MFC 3_SF6: Yes MFC 4_AR: Yes MFC 5_N2: Yes MFC 6_CF4: Yes MFC 7_O2: Yes MFC 8_SF6: Yes MFC 9_HE: Yes MFC 10_O2: Yes MFC 11_NF3: Yes MFC 12_30%O2/HE: Yes Regulator (12/12): 12/12 RPDB Power box: Yes PM3: TCP Match: Yes TCP Coil: Yes Bias match: Yes Process manometer: Model no: E28B-23743 Range: 0.1 Torr Process manometer valve assy: Yes AC / SSR Box: Yes Fore line manometer: Yes Turbo pump fore line isolation valves, manometers: Yes Turbo pump: Yes (ATM2300M) VME Assembly: Yes VAT Pendulum valve: Yes Fore line Assy: Yes He cooling / Lift box: Yes Motor stepper board: Yes RF Cart: PM2 Turbo controller: Yes Generator (TCP): Yes (660-900984-008) Generator (BIAS): Yes (3155059-026) PM2: Gas box (GIB): Yes MFC 1_CL2: Yes MFC 2_HBR: Yes MFC 3_SF6: Yes MFC 4_AR: Yes MFC 5_N2: Yes MFC 6_CF4: Yes MFC 7_O2: No MFC 8_SF6: Yes MFC 9_HE: Yes MFC 10_O2: Yes MFC 11_NF3: Yes MFC 12_30%O2/HE: Yes Regulator(12/12): 10/12 PM4: TCP Match: Yes TCP Coil: Yes Bias match: Yes Process manometer: Model no: E28B-23743 Range: 0.1 Torr Process manometer valve assy: No AC / SSR Box: Yes Fore line manometer: Yes Turbo pump fore line isolation valves, manometers: Yes Turbo pump: Yes (ATM2300M) VME Assembly: Yes VAT Pendulum valve: Yes Foreline Assy: No He cooling / Lift box: Yes Motor stepper board: Yes RF Cart: PM2 Turbo controller: Yes Generator (TCP): Yes (660-900984-008) Generator (BIAS): Yes (3155059-026) PM3: Gas box (GIB): Yes MFC 1_CL2: Yes MFC 2_HBR: Yes MFC 3_SF6: Yes MFC 4_AR: Yes MFC 5_N2: Yes MFC 6_CF4: Yes MFC 7_O2: Yes MFC 8_SF6: Yes MFC 9_HE: Yes MFC 10_O2: Yes MFC 11_NF3: Yes MFC 12_30%O2/HE: Yes Regulator(12/12): 12/12.