판매용 중고 LAM RESEARCH 2300 Versys Poly #9158592

Poly etcher EFEM: Part no Load port (1): 002-7200-33 Load port (2): 002-7200-33 Load port (3): 002-7200-29 Atm robot: Yes Wafer alignment: Yes Power control rack: AC Rack: Model no: 2300 Vintage: 2007 Rear user interface monitor: Yes Robot controller: No P/C: Yes Vacuum TM: Airlock (Right): Yes Airlock (Left): Yes VTM Robot: No TM / PM Facility lines: Yes Slop valve load lock (Right): Yes Slop valve load lock (Left): Yes Vacuum TM: Part no Inner door Assy (Air lock right): 853-007851-232 Inner door Assy (Air lock left): 853-007851-232 Inner door Assy (PM2): 853-007859-925 Inner door Assy (PM3): 853-007859-212 Inner door Assy (PM4): 853-007859-223 Process module: PM1: 2300 Poly: Model no: 2300 poly TCP match: Yes TCP coil: Yes Bias match: Yes Process manometer: Model no: E28B-30584 Range: 0.1 Torr Process manometer valve assy: No AC/SSR Box: Yes Fore line manometer: Yes Turbo pump fore line isolation valves, manometers: Yes Turbo pump: Yes (ATM2800M) VME Assembly: Yes VAT Pendulum valve: Yes Foreline assy: No He cooling / lift box: Yes RF Cart: PM2 Turbo controller: Yes Generator (TCP): Yes Generator (BIAS): Yes PM1: Gas box (GIB): Yes MFC 1_CL2: Yes MFC 2_HBR: Yes MFC 3_SF6: Yes MFC 4_AR: Yes MFC 5_CH3F: Yes MFC 6_CF4: Yes MFC 7_SF6: Yes MFC 8_02: Yes MFC 9_NF3: Yes MFC 10_O2: Yes MFC 11_HE: Yes MFC 12_CHF3: Yes RPDB Power box: Yes Process module: PM2: 2300 Poly: Model no: 2300 poly Vintage: 2007 TCP match: Yes TCP Coil: Yes Bias match: Yes Process manometer: Model no: E28B-23747 Range: 0.1 Torr Process manometer valve assy: Yes AC/SSR Box: Yes Fore line manometer: Yes Turbo pump fore line isolation valves, manometers: No Turbo pump: Yes (ATM2300M) VME Assembly: Yes VAT pendulum valve: Yes Foreline assy: Yes He cooling / lift box: Yes RF Cart: PM3 Turbo Controller: Yes Generator (TCP): Yes Generator (BIAS): Yes PM2: Gas box (GIB): Yes MFC 1_CL2: Yes MFC 2_HBR: Yes MFC 3_SF6: Yes MFC 4_AR: Yes MFC 5_CH3F: Yes MFC 6_CF4: Yes MFC 7_SF6: Yes MFC 8_02: Yes MFC 9_NF3: Yes MFC 10_O2: Yes Process module: PM3: 2300 Poly: Model no: 2300 poly Vintage: 2007 TCP match: Yes TCP Coil: Yes Bias match: Yes Process manometer: Model no: E28B-23747 Range: 0.1 Torr Process manometer valve assy: No AC/SSR Box: Yes Fore line manometer: Yes Turbo pump fore line isolation valves, manometers: Yes Turbo pump: Yes (ATM2800M) VME Assembly: Yes VAT Pendulum valve: Yes Foreline assy: No He cooling / lift box: Yes RF Cart: PM4 Turbo controller: Yes Generator (TCP): Yes Generator (BIAS): Yes PM3: Gas box (GIB): Yes MFC 1_CL2: Yes MFC 2_HBR: Yes MFC 3_SF6: Yes MFC 4_AR: Yes MFC 5_CH3F: Yes MFC 6_CF4: Yes MFC 7_SF6: Yes MFC 8_02: Yes MFC 9_NF3: Yes MFC 10_O2: Yes MFC 11_HE: Yes MFC 12_CHF3: Yes Vintage: 2007.