판매용 중고 LAM RESEARCH 2300 Exelan #9158591

Etcher, 12" EFEM: Load port (1): Yes Load port (2): Yes Load port (3): Yes Atm robot: No Wafer alignment: Yes Power control rack: AC Rack: No Rear user interface monitor: No Robot controller: No P/C: No Vacuum TM: Airlock (Right): Yes Airlock (Left): Yes VTM Robot: No TM / PM Facility lines: Yes Slop valve load lock (Right): Yes Slop valve load lock (Left): Yes Vacuum TM: Part No Inner door Assy (Air lock Right): 853-007861-002 Inner door Assy (Air lock Left): 853-007861-003 Inner door Assy (PM2): 853-007859-002 Inner door Assy (PM3): 853-007859-004 Inner door Assy (PM4): 853-007859-923 Process module: PM2: 2300 Exelan: Model no: Exelan 2300 Vintage: 2003 VAT Pendulum valve: Yes Turbo pump (ATH 1600M): Yes Turbo controller: Yes WAP Manometer: Model no: 628B01TED1B OES Spectrometer: Yes AC Box: Yes Fore line manometer: Yes Turbo pump fore line isolation valves, manometers: Yes Interlock PCB: Yes VME Assembly: Yes DC Power: Yes BICEP Power supply / RF Match: Yes He cooling / Lift box: Yes RF Cart: RF System A/C power: Yes Generator (TCP): Yes Generator (BIAS): Yes Gas box(GIB): Yes MFC 1_C4F8: Yes MFC 2_N2: Yes MFC 3_O2: Yes MFC 4_CF4: Yes MFC 5_O2: Yes MFC 6_CHF3: Yes MFC 7_AR: Yes MFC 8_: Yes MFC 9_O2: Yes MFC 10_O2: Yes MFC 11_CH2F2: Yes MFC 12_C3F8: Yes RPDB Power box: Yes PM3: 2300 Exelan: Model No: Exelan 2300 Vintage: 2003 VAT Pendulum valve: Yes Turbo pump (ATH 1600M): Yes Turbo controller: Yes WAP Manometer: Model no: E28B-23743 OES Spectrometer: Yes AC Box: Yes Fore line manometer: Yes Turbo pump fore line isolation valves, manometers: Yes Interlock PCB: Yes VME Assembly: Yes DC Power: Yes BICEP Power supply / RF Match: Yes He cooling / Lift box: Yes RF Cart: RF System A/C power: Yes Generator (TCP): Yes Generator (BIAS): Yes Gas box (GIB): Yes MFC 1_C4F8: Yes MFC 2_N2: Yes MFC 3_O2: Yes MFC 4_CF4: Yes MFC 5_O2: Yes MFC 6_CHF3: Yes MFC 7_AR: Yes MFC 8_: No MFC 9_O2: Yes MFC 10_O2: No MFC 11_CH2F2: No MFC 12_C3F8: No PM4: 2300 Exelan: Model no: Exelan 2300 Vintage: 2003 VAT Pendulum valve: Yes Turbo pump (ATH 1600M): Yes Turbo controller: Yes WAP Manometer: Model no: E28B-23747 OES Spectrometer: Yes AC Box: Yes Fore line manometer: Yes Turbo pump fore line isolation valves, manometers: Yes Interlock PCB: Yes VME Assembly: No DC Power: Yes BICEP Power supply / RF Match: Yes He cooling / Lift box: Yes RF Cart: RF System A/C power: Yes Generator (TCP): Yes Generator (BIAS): Yes Gas box (GIB): Yes MFC 1_C4F8: Yes MFC 2_N2: Yes MFC 3_O2: Yes MFC 4_CF4: Yes MFC 5_O2: No MFC 6_CHF3: Yes MFC 7_AR: Yes MFC 8_: No MFC 9_O2: Yes MFC 10_O2: No MFC 11_CH2F2: No MFC 12_C3F8: No.