판매용 중고 GASONICS / NOVELLUS L 3510 #9411534

Asher Photoresist strip Substrate size: 3"-8" Footprint: 30" Main frame: Aluminum chamber Quartz chamber Wafer cooling station with PCW Platen and lamp heating (Flexibility) Reliable endpoint detection Z-Bot station (Robot) Load cassettes elevator DC Power supply: -5, +5, -12, +12 VDC (2) DC Power supplies: +5, -15, +15, +24 VDC I/O Board Distribution board Display board Graphics control board Hard Disk Drive (HDD) Floppy Disk Drive (FDD), 3.5" Microwave generator: 2.45 GHz, 1250 W Interlock wafer transport Microwave power supply Gas flow controller Visual alarm indicator lamp Quartz gas distribution shower heads Radiant heating plate UV Lamp End point detection Plasma system controller Tolerance limit alarm (pressure, flow, lamps) Gas handling module and control features (3) Gas lines with purge: O2 MFC (2) N2 MFC Stainless steel valves gas line Solenoid control: 24 VDC Soft pump to limit chamber turbulence AC Power box Circuit breaker: 30 Amp Remote option connector EMO Control to master system Circuit breaker Magnetron Schematic display driver Process kits Panel included Manuals included Power supply: 200-240 VAC, 50/60 Hz, Single phase, 30 A 2000 vintage.