판매용 중고 AMAT / APPLIED MATERIALS EMAX #9133082

Dry Etchs, 8" JMF Application: oxide etch Chamber Type/ Location System Configuration BASE Position A Oxide Main Etch Position B Oxide Main Etch Position C Oxide Main Etch Position F ORIENTER Position A Configuration Oxide Main Etch Position B Configuration Oxide Main Etch Position C Configuration Oxide Main Etch System Safety Equipment EMO Switch Type TURN TO RELEASE EMO ETI COMPLIANT EMO Guard Ring INCLUDED Smoke Detector At MF No Skin YES Smoke Detector At Gen Rack YES Smoke Detector At AC Rack YES Water and Smoke Detector ALARM System Labels ENGLISH CHA - CHA - OXIDE EMAX Process Kit USED EMAX Oxide Turbo Pump Acatel 1600 Emission Endpoint Type Monocro EMAX Oxide ESC USED Flat EMAX Oxide BIAS RF GEN OEM-28B EMAX Oxide Throttle Dual Butter fly EMAX Oxide Gate Valve Pendlum CHB - CHB - OXIDE EMAX Process Kit USED EMAX Oxide Turbo Pump Acatel 1600 Emission Endpoint Type Monocro EMAX Oxide ESC USED Flat EMAX Oxide BIAS RF GEN OEM-28B EMAX Oxide Throttle Dual Butter fly EMAX Oxide Gate Valve Pendlum CHC - CHC - OXIDE EMAX Process Kit USED EMAX Oxide Turbo Pump Acatel 1600 Emission Endpoint Type Monocro EMAX Oxide ESC USED Flat EMAX Oxide BIAS RF GEN OEM-28B EMAX Oxide Throttle Dual Butter fly EMAX Oxide Gate Valve Pendlum Gas Delivery Options Pallet Options Valve Fujikin Regulator Fujikin MFC Type AREA FC-780C Gas Panel Pallet A Gas Panel Pallet A Gas Line Requirement Pallet Pallet Gas Line Configuration Pallet Corrosive Gas Line Qty 3 Pallet Inert Gas Line Qty 5 Filter Qty 8 Gas Panel Pallet B Gas Panel Pallet B Gas Line Requirement Pallet Pallet Gas Line Configuration Pallet Corrosive Gas Line Qty 3 Pallet Inert Gas Line Qty 5 Filter Qty 8 Gas Panel Pallet C Gas Panel Pallet C Gas Line Requirement Pallet Pallet Gas Line Configuration Pallet Corrosive Gas Line Qty 3 Pallet Inert Gas Line Qty 5 Filter Qty 8 Gas Panel Features Gas Panel Features Gas Panel Features Gas Panel Controller VME I Mainframe General Mainframe Options Facilities Type REGULATED Facilities Orientation MAINFRAME FACILITIES BACK CONNECTION Loadlock/Cassette Options Loadlock Type NBLL W/ AUTO-ROTATION Loadlock Cover Finish ANTI-STATIC PAINTED Loadlock Slit Valve Oring Type VITON Wafer Mapping STD Wafer Out of Cassette Sensor YES Cassette Present Sensor YES Transfer Chamber Options Transfer Ch Manual Lid Hoist YES Robot Type CENTURA HP+ ROBOT Wafer On Blade Detector BASIC Loadlock Vent BOTTOM VENT Front Panel Front Panel ANTI-STATIC PAINTED Signal Light Tower 4 COLOR SIGNAL LIGHT TOWER INCLUDING RED LIGHT 4 Color Signal Light Tower Configuration Top Light Color RED Second Light Color YELLOW Third Light Color GREEN Fourth Light Color BLUE Signal Light Tower Buzzer ENABLED Second Signal Light Tower YES Remote System Controller Controller Type 86 INCH COMMON CONTROLLER Cntrlr Electrical Interface BOTTOM FEED Controller Exhaust TOP EXHAUST Controller Cover Option YES System Monitors System Monitor 2 TTW / different cable lengths Monitor Cursor 2 BLINKING CURSOR AC Rack GFI 30mAMP AC Rack Types 84 INCH SLIM AC GEN RACK Exhaust Collar 84 INCH SLIM RACK EXHAUST COLLAR Umbilical Ctrlr to Mainframe Umbilical 25Ft HX Control Cable Length 50Ft Heat Exchanger Hose Length 65Ft Pump Cable Length 65Ft RF Generator Cable 65Ft Pump Interface Only Pump Interface Qty Interface Only