판매용 중고 ALCATEL / ADIXEN / PFEIFFER AMS 4200 #9304661

Etcher, 6" (2) Dry etch chambers With (1) E-chuck BROOKS AUTOMATION Handler (4) Chambers Load / Unload station (4) Pumps Control units (2) Chillers PWD Cabinet / Scrubber (3) Computer consoles (2) LN2 Tanks Process chamber 1: Silicon oxide (RGV Dielectric) etch process module RIE Source reactor Substrate holder with E-Chuck, 6" Bias 600 W LF Reactor pump: ADP 122H and ATH 1600M on DN40 Throttle valve Gas lines: CF4, O2, CHF3, He Process chamber 2: Silicon etch process module ICP Plasma source Cryo temperature process Cryogenic substrate holder With mechanical clamping chuck, 6" Source: 3 kW RF Auto matching network Laser view port adapter Pumping line to pump down the substrate holder He backside cooling Bias 300 W RF LN2 Controlled cooling Dewar LN2 tank PM ADP 122 Reactor pump ATH 1600M Maglev turbo pump DN200 Heated throttle Cold trap Gas lines: SF6, O2, O2, N2 Handling platform: BROOKS AUTOMATION MX 600 Platform with MAG 7 robot 6-Sided platform: (2) Process modules (2) Cassette modules (2) BROOKS AUTOMATION VCE6 Cassette modules Electrical cabinet RF Generator PLC Breaker Control module End point detection Accessories Etch module with gas cabinet: CF4, O2, CHF3, He, Ar, N2 Etch module with gas cabinet: SF6,O2, O2,N2 BROOKS MX 600 Handler platform (2) Control cabinets Power distribution cabinet (2) ADP122H Fore pumps (2) A100L Fore pumps (2) Chillers Transformer, 125 KVA GUI, (3) Consoles Gas abatement, centrotherm Manuals Cables Hoses Computer Endpoint detectors 2007 vintage.