판매용 중고 ALCATEL / ADIXEN / PFEIFFER 601E #293743831

ID: 293743831
웨이퍼 크기: 4"
Deep Reactive Ion Etcher (DRIE), parts system, 4" Pumps (2) Load lock turbo pumps 2063 Pump C2 Plus oil filter Filling tube for liquid nitrogen Gases: SF6, CF4F8, O2, CHF3, AR Cooling type: Liquid nitrogen Plasma and RF Generator Temperature range: LN2.
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