판매용 중고 JST V350 #9070711

Hot N2 dryers Hot nitrogen PLC Controlled Stainless steel construction Cassettes: (3) 200 mm 300 mm Drying applications: Silicon wafer Glass substrates Disc drives Optics Options: Charcoal filter Bulk chemical dispense Safety: Sealed vessel with closed loop process Load / Unload: No vapor present Low emissions: <1 lb per day Indirect heating: IPA CO2 Fire suppression system Automated lid with safety interlocks Controls: Industrial grade PLC Modular design for quick replacements & minimal down time Interactive touch screen interface Alarm indicator screens for easy troubleshooting Design: Multi-level menu Flexible process adjustment Visual process flow during recipe operation Multi level security structure Independent CO2 fire controller interlocked to master PLC control Wafers in quartz Cassette / Glass panels: Up to 550 mm x 650 mm Dry cycle: 10 Minutes IPA: 60 cc per Cycle Proven process: Particle neutral drying size: 0.16m Facility requirements: CDA: 80 psi, <10 cfh Argon / Nitrogen: 20 psig @ 2 cfm Per cycle: < 1.5 cft Exhaust: ~ 80 scfm, 4” Collar Electrical: 208 VAC, 3 Phase, 5 wire, 30 A.