판매용 중고 TEL / TOKYO ELECTRON Alpha 8S #9060562

Vacuum anneal furnace, 8" 8" Interface cassette Through wall installation H2 and N2 Anneals Brooks 5964 MFCs MFC 1 - N2 10 slm MFC 2 - N2 10 slm MFC 3 - H2 5 slm MFC 4 - H2 10 slm MFC 5 - H2 5 slm (2) Hydrogen detectors (100) Wafer loads 1200C Heat range core Rapid cool Lipseal, Inner T/C, linear aligner up / down axis side motions No variable pitch: Single or (5) wafer 16" Process tube TS-4000Z Controller Temperature controller: Model 121 Boat, CLN OX - 07-00202 Cover pedestal - 07-00204 Pedestal - 07-00205 PFA tube (6.35x4.35x1.0T) 3 Phase Voltage: 208V Direction: Left Load station: (2) I/O Ports (2) Cassette arms SMIF Loader: No N2 Purged loadlock: No WIP Carrier storage capacity: 8 End effector: 1 or 5, Fixed pitch Wafer spacing: Fixed Boat rotation: No Furance: (5) Zones Heater type: VMM-35-001 Rapid cooling configuration: No Tube seal configuration: O-ring Temperature control methodology: PID Thermocouple: Type R External torch: No H2 Burn off: No Bubbler system: No Gas leak detection: Yes (H2 and O2) Moisture sensor: No Process gases (atmospheric): N2, H2 MFC1 Model / type: Brooks 5964 Process gases: N2 Flow rate: 20 SLM MFM1: Model / type: Brooks 5964 Process gases: N2 Flow rate: 10 SLM MFC2 Model / type: Brooks 5964 Process gases: H2 Flow rate: 5 SLM MFC3 Model / type: Brooks 5964 Process gases: H2 Flow rate: 10 SLM MEC4 Model / type: Brooks 5964 Process gases: H2 Flow rate: 5 SLM Process pressure control system: Vacuum pump: EDWARDS QDP80 Pressure controller: VARIAN LR300 Process manometer: MKS 625A 100 Pressure differential manometer: MKS 625A 1000 Inline cold trap: No Inline particle trap: No Manuals.