판매용 중고 SVG / THERMCO / AVIZA AVP 8000 #9172756

Vertical LPCVD furnace, 8" SELOX Process type: Selective oxidation System interface: Computer: Sun ultra 5 System software: AVP Software version 2.6.1 Printer assy: No Interlock test procedure: TBD AC Power input options and line frequency: 480 VAC, 3 phase, 60 Hz Wafer type: Notch SMIF: No Cassette type: Entegris Cassette model: KA202-80SH-47C02 Carousel: (16) Cassettes (2) Levels Wafer counter: Present End effector type: Optical sensor Includes: Post process exhaust burning unit Heater element: (5) Zones Mid temp P/N: 602783-08 Torch assy: P/N: 172441-003 Torch spike TC: P/N: 739655-001 Torch injector TC: P/N: 739603-001 Thermo-couple type: R Profile: P/N: 910601-001 Spike: P/N: 103365-01 Over temp: Zones: 1-4 P/N: 103281-01 Over temp: (5) Zones P/N: 103365-01 Scrubbed exhaust: 4" Bottom Cabinet (non-scrubbed) exhaust: 6", top Door oring: Face seal / O-Ring P/N: 105640-02 / 781053-003 TCA Controller: No Door: Stainless steel door P/N: 601486-02 Quartz: Tube: Dual-wall (1) Piece P/N: 105678-01 Liner: No Silicon carbide element liner: No Quartz boat: No Silicon carbide boat: Present P/N: 109085-03 Pedestal assembly: Present P/N: 108930-01 Silicon carbide baffle: Present P/N: 109086-01 Quartz crossover: No Quartz external Ox (Troch) chamber: (1) Piece P/N: 815016-665 Torch assy: External Exhaust elbow: Present P/N: 105936-01 TC/Seath: Integrated into quartz tube Gas panel: Gas schematic Gas panel: P/N: 606820-01 Rev: 4 P/N: 606821-01 Rev: 5 MFC Type: Unit 1660 / Tylan FC 2900 N2 Dilution: 500 SLPM (Oriface) H2 Low MFC: (1) SLPM P/N: 910459-146 H2 High MFC: (30) SLPM P/N: 910459-155 Purge N2 MFC: No UHPO2 MFC: (3) SLPM P/N: 910459-154 UHPN2 Low MFC: (2) SLPM P/N: 908165-012 UHPN2 High MFC: 30 SLPM P/N: 910459-009 Gas filter size / Type: Wafer guard P/N: 907063-010, 001 Gas panel N2 pressure gauge size / Type: Span pressure transducer: 0 - 250 psia P/N: 701990-003, 002 P/N: 1-909909-001 Gas panel O2 pressure gauge size / Type: Span pressure transducer: 0 - 250 psia P/N: 710990-002 Gas panel H2 pressure gauge size / Type: No P/N: 701990-003 Gas panel N2 size / Type: No P/N: 710990-002 Gas panel N2 regulator size / Type: Tescom: 0-60 psig P/N: 1-908552-001 Gas panel O2 regulator size / Type: Tescom: 0-60 psig P/N: 1-908552-001 Gas panel H2 regulator size / Type: Tescom: 0-60 psig P/N: 1-908552-001 Gas panel N2 regulator size / Type: Tescom: 0-60 psig P/N: 1-908552-001 Boat area N2 purge: Flow control Carousel area N2 purge: Flow control Pressure settings: UHPN2: 45 ± 10 psig / (55) SLPM UHPO2: 45 ± 10 psig / (3) SLPM N2 Purge: 45 ± 10 psig / (30) SLPM H2: 45 ± 10 psig / (30) SLPM N2 Dilution: 60 +5, -0 / (500) SLPM N2 Automation: 100 psig 2002 vintage.