판매용 중고 MRL MDL 1148 #9170550

Diffusion furnace Welded frame construction with antique white painted frame and panels Front access through swing out bi-fold doors Element on center lines, 19" Service access: Tilt down front instrument panels Internal round electro polished scavenger with individual tube level exhaust Stainless steel tube: Diameter, 3" R Spike for temperature control Redundant excess temperature interlock Air to water heat exchanger Fan cooling module on top Auxiliary power requirements: 120 V Step-down transformer Furnace control power back-up: UPS (6) Leveling feet Heating elements (Tube 2, 3 and 4): (3) Zones element Linear thermal flat zone, 48" Element uniformity: +/- 1.0°C Below 600°C across linear flat zone +/- 0.5°C Above 600°C across linear flat zone Insulation / Energy kits are included per tube level Load and source end blocks Soft tube collars Soft heat disks Load station: Welded frame construction with antique white painted frame and access panels Mirror polished finish on work surface Pullout drawers in load station base Horizontal laminar flow with fire retardant, Class I HEPA filters Variable speed blowers to supply air flow to HEPA filters Front access laminar flow pre-filters Channels on back wall allow universal mounting of cantilevers (6) Leveling feet Auxiliary power requirements: 110 V Outlets Gas Plumbing Module (GPM): Welded frame construction with antique white painted frame and access panels (4) Stainless steel tube level shelves Side and front access through clear vented lexan doors (4) Leveling feet Gas trays are mounted vertically, facing front Main breaker and tube breaker with lock out tag out capability located in base Element MRL MaGnA Maximum operating temperature: 1100°C Process tube: Quartz process tube Carriers: Quartz Baffles: Non-product boats on load Source end of product wafers Load baffles: Quartz 3 plate paddle shank Profile TC: Type R 3-Junction Source entry SiC Paddle: 2" Square shank, slotted Gas tray: (4) AERA Analog mass flow controllers (MFCs) Nitrogen (N2), High flow Nitrogen (N2), Low flow for carrier gas (POCL3) Oxygen (O2), High flow Oxygen (O2), Low flow N2 Loop with fixed orifice Normally open valve is provided during power fail Pressure switch with gauge on carrier N2 per bubbler system Bubbler assembly for POCl3 (Tube level 2, 3 and 4): JC SCHUMACHER ATCS-15 Source temperature controller Gas tray to bubbler to process tube: Teflon connections / Valves Chemical ans flask MRL Z3 Cantilever belt drive (X 3, tube 2, 3 and 4): Box beam backbone for overall drive support Precision linear rail providing smooth ride (2) Profile linear bearings Front and rear sprocket with non-particulate ladder chain 360:1 Gear reducing DC motor: 24 V Local and remote modes of operation: System DDC Cantilever control box Power supply Digital drive controller With Load / Unload / Stop / Local Remote switches Thumb wheel speed buttons Load and unload approach photo sensors With pre-dwell Post-dwell prior to door closure Boat out complete Backside mounting Diagnostic LED’s within power Interconnecting cable (3) MRL Z2 atmospheric head assemblies (Tube 2, 3 and 4) SAINT GOBAIN Square shank SiC paddle compatible, 2" (2) Self aligning top and bottom head assemblies (3) Clamping assembly to secure door assemblies Adjustable pivot pin Paddle containment tube with torque sensitive paddle lock Quartz door closure SST Scavenger closure plate Dual quartz rods with teflon retainers housed in a SST clamping tube assembly 5 Axis of adjustment Designed for tool less head and door removal (3) MRL Tube level controllers (Tube 2, 3 and 4) (15) Valves on / Off (8) MFC's to one of 4 values (3) Zones of heat to 1 of 8 temperature Temperature control mode: Spike or profile (7) Front panel outputs (Lights / Horn) Programmable step exits from one or more of following On time (Hours: minutes: seconds) On (12) Programmable digital inputs On analog input (Temperature or gas) programmed value On leak check On profile completed On complete boat-in or boat-out (for auto load only) (3) Independent temperature control loops: Direct digital temperature control (8) Set points per loop Programmable alert / Alarm deviation limits Spike control mode with programmable PID coefficients Profile control mode (15) Valve outputs: Designed to drive pneumatic solenoid directly (5 watt) 24 VDC Supplied with system (8) Analog (MFC) loops: Designed for direct interface to standard MFC's (4) Set points per loop Programmable alert / Alarm deviation limits Step redirect: (8) Redirect destinations Programmed based on various combinations: Digital inputs Temperature alarms Gas alarms Human machine interface HMI Color touch screen per tube level Spare parts included: Fuse set Indicator light and lens set SCR Firing card Temperature controller 1/32 din (2) Dual junction spikes t/c type R Tri junction type R profiles t/c Load end vestibule block Source end vestibule block Load end soft collar Source end soft disk Quartz process tube (4) Quartz boats Quartz door closure (2) Quartz nails (2) Quartz nail sleeves Quartz door seal (2) Soft O’Rings for quartz door seal.