판매용 중고 KOKUSAI Vertron III / DJ-803V #9270558

Vertical LPCVD furnace, 8" Process: LPCVD Nitride CX2001 System controller SECS/GEM Communication: Load station BROOKS SMIF Loader MIDAS Gas detector: Process gas detection module N2 Purged load lock WIP Carrier storage capacity: 8" Wafer spacing: 6.5 mm Load size: 125 Slots Boat rotation Furnace: CQ1501A Temperature controller (4) Zones D4EX02626 Heater: Mid temperature Process temperature: 650°C-780°C Flat zone length: 1200 mm QUARTZ Process tube material QUARTZ Wafer boat material Tube seal: O-Ring seal (Viton) Temperature control methodology: Closed loop (PID) Thermocouple type: R-Type Process gas control system: Process gases (LPCVD): HORIBA STEC Z500 MFC Process gases: DCS, NH3 Other gases: N2 Process pressure control system: EDWARD QDP80 Vacuum pump Dry pump capacity: QMB1200 Fore line size: 80 CX1204 Pressure controller Process manometer Pressure differential manometer Pump manometer Inline cold trap Exhaust controller BROOKS SMIF Loader (Left/Right): Integrated and base mounted with cassette optical light sensor detection Heater voltage: 280 VAC, Single phase, 42 K A/C Controllers: 100 VAC, Single phase, 10 K A/C Clean unit: 100 VAC, Single phase, 10 K A/C 1999 vintage.