익숙한 KOKUSAI QUIXACE II 판매용

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ID#: 9027427 제조사: KOKUSAI 모델: QUIXACE II 범주: DIFFUSION FURNACES & ACCESSORIES 웨이퍼 크기: 12" 장비 세부 정보: Vertical furnace, 12"
Single tube
Product load size: 125
Rapid Heating / Cooling (RHC)
Boat rotation
SEMI S2-0200E compliance
Main and sub (rear) operation controllers

Main controller: CX5000
SEMI EDA capability
Dual boat 125 WLS
Integrated Gas System (IGS) type: Fujikin 1.125"
RHC1 upgrade
Quartzware (1st set)
Rear operation panel
(2) Hard gas pattern panels
HPM (toxic gas) interlock
POD ID reader (AdvanTag GATEWAY HSMS)
OHT capability
Exhaust APC
Boat rotation type: N2 purged rotation
Self gas cleaning
EEMS CX-9800 server capacity and license

Options:
Canister (BK1200) for TiCl4
Bubbler (VG600W).
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가격

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