판매용 중고 KE DD-1223V #9381846

Furnace, 12" Process: Pyro (100) Process wafers Process type: Oxide Gas supply: Bottom PCW Supply: Bottom Boat operation: 1 Boat (25) Carrier slots Heater type: D4EX16975-1 Gases: N2, O2, H2, HCl Hard Disk Drive (HDD) System control: CX3002C Main controller Operation screen: Touch screen Gas flow chart (Front, rear) CQ1600 Temperature controller Pressure control: EPV100-AW Controller power: Ø1 208V 150A Heater power: Ø3 208V 350A Tape heater controller: SR Mini Torch Process gases: Gas name / Type Gas 1 / N2 FC-D986Y-BF 30SLM Gas 2 / N2 FC-D986Y-BF 50SLM Gas 3 / O2 FC-D986Y-BF 20SLM Gas 4 / O2 FC-D985Y-BF 5SLM Gas 5 / H2 FC-D986Y-BF 20SLM Gas 6 / Hcl FC-D985Y-BF 0.5SLM Gas 7 / N2 FM-D866Y-BF 10SLM Gas 8 / N2 FM-D866Y-BF 5SLM Gas distribution system: Basic style: FUJIKIN IGS Tubing material: SUS-316L Tubing finish: VCR FUJIKIN Manual valve FUJIKIN Air operated valve AP TECH Regulator MFC (Maker, model): AERA Exhaust distribution system: APC EPV-100 Wafer / Cassette handling: (16) Cassette storages Cassette in / Out port Cassette handling robot Wafer transfer type: 1+4 Fork material: Ceramic (5) Forks Fork variable pitch Fork wafer presence sensor Elevator handling: Boat elevator Auto shutter Boat rotation Mechanical parts Heating chamber: D4EX16975-1 Heater Spike T/C Overtemp protect T/C Door interlock Exhaust system: Heater exhaust Gas box exhaust Process exhaust ETC: Handy terminal Manifold assembly Cap base assembly Tube setting part assembly Missing parts: Scavenser EXH MS3 Sensor Torch TC 2001 vintage.