판매용 중고 HITACHI / KOKUSAI DJ-1206VN-DF #9241673

Diffusion furnace Process: Poly_DS System configuration: Furnace unit: (5) T/C Heater controls (5) T/C for over temperature protections 5-P T/C for cascade controls Cartridge heater Controller: (2) Gas flow pattern panels (2) Temperature controllers Main controller (OU) Main operation unit Sub operation unit Process module controller MFC / Pressure unit FOUP Loader controller unit Wafer handling controller unit Valve / Interlock control unit Switching unit Signal tower (Front) Drive mechanisms: (2) Wafer detections I/O Shutter AGV/PGV/OHT Stage FOUP Loader Rotation FOUP storage Foup opener Wafer transfer Variable wafer pitch converter Boat elevator Boat changer Furnace port shutter Boat rotation Gas system: Gas unit (IGS) Exhaust system: (3) Valve heaters Dry pump & mechanical booster pump Pressure sensor (1000 Torr) Pressure sensor (10 Torr) Pirani sensor Main valve Exhaust piping Exhaust dilution line Reactor tube press leak line Jacket heater pipe exhaust pipe Tape heater for exhaust pipe Inlet heater Safety: Light curtain system Other: (2) OHT I/F Units (2) Chemical filters Gateway-HSMS RF ID Reader N2 Purge load lock system: O2 Monitor / Detector FOUP Opener N2 purge system Loading area N2 flow control MFC Loading area N2 purge line FOUP Opener N2 purge line Power supply: 120 VAC, 1 Phase 2011 vintage.