판매용 중고 PVA TEPLA FZ 14MV #293748092

Float zone crystal grower Vacuum chamber with door Vacuum system Gas: Ar Cooling water system (2) Pumps with filter HF Tube oscillator Oscillating circuit Control cabinet Feed rod holder Inductor Seed holder Preheater Generator Vacuum valve Remote box PLC Control Vacuum gauge Operating panel Indicator Silicon material components: Polycrystalline rod diameter: Up to 50 mm Polycrystalline rod length: Up to 300 mm Pulled silicon crystal diameter: Up to 25 mm Seed crystal diameter: Φ5 mm Seed crystal length: 80 mm Float zone crystal length: Up to 300 mm Atmosphere: Ultimate vacuum: 2.5 x 10^-5 mbar Leakage rate: <1x10^-3 mbar I/s^-1 Inert gas pressure: 5-10 bar Inert gas flow rate: 0-18 Nl/min Operating pressure: -1 to +2 bar Motion: Pulling speed: 0-30 mm/min Lift speed rapid movement: 100-300 mm/min Maximum travel: 350 mm Crystal rotation: 0-50 min^-1 Cooling water: Consumption: 45 L/min (Approx) Inlet temperature: 293 ±5K Inlet pressure: 4-6 bar pH Value: 7-8 Water hardness: <8° DH Maximum conductivity: 300 µS/cm HF Power supply: HF Power: 18 kW Frequency: 1000-2400 kHz Accuracy: ±0.5% Actual value variation: ±0.5% Allowed supply voltage fluctuation: ±5% RG218 Coaxial power cable, 2 m Power supply: 400 VAC ±10%, 31.5 kVA, 50 A, 3 Phase, 50 Hz.