익숙한 KLA / TENCOR ASET-F5x #9363501 판매용

ID#: 9363501

제조사:

KLA / TENCOR

모델:

ASET-F5x

웨이퍼 크기:

8"-12"

장비 세부 정보:

Film thickness measurement system, 8"-12"
Open cassette loader, 8"-12"
PDBS (Ehanced)
Dual beam spectrometer (XENON Lamp)
Spectroscopic Ellipsometer (SE)
DUV SE (Deep UV SE, 190 nm)
Pat maximum: 8100
CPU
Frequency: 2.6 GHz
Operating system: Windows NT.
loading