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ID#: 181364 제조사: KLA / TENCOR 모델: 6220 SURFSCAN 범주: WAFER TESTING AND METROLOGY 포도 수확: 2001 장비 세부 정보: Non-patterned Wafer Inspection System
Model No.: 519928
Compatible for 2", 3", 82mm, 4", 5", 6", 8"
Thickness: SEMI standard wafer thickness
Material: Any opaque, polished surface which scatters less than 5 percent of incident light
Smaller sizes factory-set at time of order
Defect Sensitivity: 0.09 micrometer diameter PSL sphere equivalent with greater than 80 percent capture rate
Haze/Sensitivity: 0.02 ppm minimum
Resolution: 0.002 ppm
Repeatability: Count repeatability error less than 0.5 percent at 1 standard deviation (Mean count greater than 500, 0.364mm dia. latex spheres)
Count Accuracy: Better than 99 percent (verified with VLSI Standards’ Relative Standard)
Spatial Resolution: 50mm spacing, minimum
Dynamic Range: 0.07 micrometer to 9,999mm in a single measurement
Throughput: 100 wph (200mm) at 0.12mm
Contamination: Less than 0.005 particles/cm2 greater than 0.15 mm dia. per single pass
Cassette Handling: Single puck wafer handling from two cassettes (one sender/receiver, one receiver)
Illumination Source: 30 mW Argon-Ion laser, 488 nm wavelength
Operator Interface: Mouse and/or dedicated user keypad
Physical Characteristics/Height: 168 cm (66 in.)
Shipping Weight: 300 kg (670 lbs)
Installation Requirements/Vacuum: 508mm (20 in.) Hg.
Electrical: 200-240V, 50/60 Hz
Power Requirement: 2 kVA
Ducted Venting: Two 102mm (4 in.) exhaust hoses
Environment: Class 10 or better
2001 vintage.
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