익숙한 KLA / TENCOR 6200 SURFSCAN 판매용

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ID#: 177831 제조사: KLA / TENCOR 모델: 6200 SURFSCAN 범주: WAFER TESTING AND METROLOGY 웨이퍼 크기: 6" 장비 세부 정보: Inspection system, 6", parts system

Specifications:
Arm type: Single
Defect sensitivity: 0.13 micron defect sensitivity @ 80% capture, based on PSL standards
Repeatability: 0.5% at 1 standard deviation
Accuracy: Accuracy within 1%
Measurement range: 0.08um to 9999um
Throughput: Up to 150 wafers per hour using 6" wafers
Contamination: Less than 0.5 particles/cm squared greater than 0.15um diameter per single pass
Laser power: 9.9~8A
Missing some PCB parts.
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