익숙한 EDWARDS 306 #89773 판매용

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ID#: 89773

제조사:

EDWARDS

모델:

306

장비 세부 정보:

Manual sputtering system 10" from spinning substrate holder on top to targets on bottom Stainless steel chamber, 12" diameter x 10.5" tall Includes viewport Diffusion pump Dual sputtering guns (~3.5" diameter) Glow discharge for soft etch Micrometer adjusted gas input Pirani gauge ADVANCED ENERGY MDX digital DC sputtering supply Manual valving Options available: Ion gauge to measure vacuum level at 10-7 (installed) Mass flow control for 2 gases Upgrade to cryopump.
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