익숙한 AMAT / APPLIED MATERIALS Centura XE+ #9351358 판매용

ID#: 9351358

포도 수확:

1999

웨이퍼 크기:

8"

장비 세부 정보:

Rapid Thermal Processor (RTP), 8"

Configuration:
SMIF System: (2) ASYST LPT2200
Mainframe: Centura divisional
Mainframe type: Toxic
Plating type: Electroless nickel plating
Mainframe skins included
Chamber A: XE+ATM
Chamber B: XE+ATM
Chamber D: SSCOOL
Chamber F: SSCOOL
Load lock type: Wide body
Load lock cycle purge
Load lock auto rotation
Load lock integrated cassette sensor
Wafer mapping mode: WWM
OTF Enable
HP Robot
Robot speed: 30000/60000 Steps
Edge-ring: 0200-36118
Rotation speed: 90/20 rpm
Standby online pressure: 780 Torr
LLA&LLB Manometer type: 1000 & 1000 Torr
LLA&LLB Manometer model: 124AA-01000BB MKS
Transfer chamber manometer type: 1000 Torr
Transfer chamber manometer model: 124AA-01000BB MKS
Process chamber manometer type: 1000 Torr
Process chamber manometer model: 624A13TBC
Pressure control mode: PID
O2 Analyzer: AMETEK CG1100

Includes:
EBARA AA20N Pump
Scrubber
BAY VOLTEX Heat exchanger, 22°C
RO2 Coolant

Process gas / Size / Brand / Model / NC or NO
N2-Purge / 10SLPM / MILLIPORE / 2900 SERIES / NO
O2-Big / 10SLPM / MILLIPORE / 2900 SERIES / NC
O2-Small / 1SLPM / MILLIPORE / 2900 SERIES / NC
N2-Process / 20SLPM / MILLIPORE / 2900 SERIES / NC
NH3 / 10SLPM / MILLIPORE / 2900 SERIES /
NC Bottom purge / N220SLPM / MILLIPORE / 2900 SERIES / NC

No burn box
CIM Linked
1999 vintage.
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