판매용 중고 DNS / DAINIPPON 80A #9133638

Scrubber Top side spin (1) Brush scrub Brush material: Mohair brush or PVA brush Brush contact distance: +1mm to -5mm max from wafer surface (adjustable at unit of 0.01mm) Brush revolutions: 440 rpm/60Hz, 380 rpm/50Hz (allowance of revolutions: ±10% max), non-rotation also settable Brush cleaning function: DI water washing at the brush standby zone by straight nozzle (1) Nano spray nozzle scrub Nozzle scanning scrub by high pressure DI water/N2 Nano nozzle angle: Approx 90 deg. to wafer surface (1) Nano nozzle Filter PALL DFA-4201 NIEY 0.1um (1) DI water rinse Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 1000 ml/min (1) Back rinse Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 200 ml /min (1) Brush cleaning Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 1000 ml /min Back Side Spin Scrubber Specification: (1) Brush scrub Brush: 0.1mm Nylon or PVA brush Brush contact distance: +1mm to -5mm max from wafer surface(adjustable at unit of 0.01mm) Brush revolutions: 440 rpm/60Hz, 380 rpm/50Hz (allowance of revolutions: ±10% max), non-rotation also settable Brush cleaning function: DI water washing at the brush standby zone by straight nozzle (1) D-sonic nozzle Nozzle scanning scrub by D-sonic DI water Nozzle material: PP,PFA,PVDF Nozzle angle: Approx 90 deg. to wafer surface (1) D-sonic DI water nozzle Filter PALL DFA-4201 NIEY 0.1um (1) DI water rinse Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 1000 ml/min (1) Back rinse Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 500 ml /min (1) Brush cleaning Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 1000 ml /min Spin motor specifications (Top Side Unit): Motor: brushless servo motor Revolution: 0 rpm to 4000rpm (subject to load of 150mm silicon wafer) Max. acceleration: 50000 rpm/s (subject to load of 150mm silicon wafer) Accuracy: ±1.5 rpm Max. revolutions: 9990 rpm(motor individual) Spin Motor Specification:(Back Side Unit) Motor: brushless servo motor Chuck pin : PEEK Revolution: 0 rpm to 6000 rpm (subject to load of 150mm silicon wafer) Max. acceleration: 1000 rpm/s (subject to load of 150mm silicon wafer) Accuracy: ±1.5 rpm Max. revolutions: 9990 rpm(motor individual) Chuck positioning mechanism: driven by spin motor D-Sonic nozzle specifications: Ultrasonic output: Max 48 W (1.5 MHz) Output current: 0.3 to 0.9A DI water flow rate: 0.6 to 1.0 L/min (variable by needle) Other specifications: (1) DI water (1) N2 (1) Vacuum (1) Dry Air (2) Spin exhausts.