판매용 중고 SCHMITT INDUSTRIES TMS-3000WRC #9225643

Surface roughness system, 5"-12" Non-contact measurement Full surface scan Front and backside measurement Friendly GUI Mapping (Color plot) function Measurement material: Bare silicon wafer / Coated silicon wafer Measurement size: 4"-12" Measurement thickness: < 100 um Water chuck method: Vacuum chucking Rotary stage: Repeatability: +/- 0.01° Accuracy: +/- 0.05° Linear stage: Repeatability: +/- 0.01 mm Accuracy: +/- 0.03 mm Computer: Pentium class computer Data generation: ASCII / SPC / Color plot with scan notes Measurement specification: Source: Class II Laser, 670 nm Spot size: ~1mm Diameter Measurement points: Programmable (Single point to full map) Data type: Ra, RMS(Rq), PV, TIS, Haze Edge exclusion: 1mm Measurement speed: 20 to 100 Measurement points / sec Measurement range: 0.2A to 10,0000A (RA or RMS) Resolution: 0.02A Repeatability: +/-0.10A Reproducibility: +/-0.20A (Reloaded) Filtering band: Low band: 0.026 to 0,129 um - 1 (7.8 to 38 um) High band: 0.129 to 1.4 um - 1 (0.88 to 7.8 um) Full band: 0.026 to 1.14 um - 1 (0.88 to 38 um) Comp band: Selectable from 0.2 to 150 um Temperature: 5°C ~ 40°C Vacuum: -9.3 Pa OD Tube connector: 6mm Standard AC power code Power: AC 100-240 V, 50/60 Hz 2014 vintage.