익숙한 TEL / TOKYO ELECTRON ALPHA 8SE-Z 판매용

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ID#: 111947 제조사: TEL / TOKYO ELECTRON 모델: ALPHA 8SE-Z 범주: DIFFUSION FURNACES & ACCESSORIES 포도 수확: 2007 웨이퍼 크기: 8" 장비 세부 정보: RIO furnace, 8"
Load size: 150
Mainframe
Gases: N2O,N2,N2,N2,O2,H2,TCA
N2 purge box
Quartz

OS Model: WAVES
System direction: L
Process type: LPRO, low pressure process
Carrier stage type: 21 Cassette stocker system
Load port type: Dual cassette I/O station, open cassette
Transfer stage type: N2 Purge Box with O2 Density & N2 Leakage Detection, N2 loadlock
Boat Elevator with Boat Rotation Mechanism
Heater type: FTPS (4 Zone), VOS-40-017 high temp
Heater controller type: M560A
Signal light tower: 4 Color
Main power control: Main AC box control
System power source: 100 Vac 50/60 Hz , 1 Phase, full load current 90A
Heater power source: 208 Vac 50/60 Hz, 3 Phase, full load current 253.6A
Automation interface: SECS interface
Rapid cooling unit: RCU box use
Pressure control: APC control CKD Ltd

Gas jungle fitting type: IGS
MFC type: STEC
MFC Scale:
N2 30 SLM 1 EA MFC
N2 10 SLM 2 EA MFC
N2 5 SLM 4 EA MFC
N2 1 SLM 2 EA MFC
N2O 20 SLM 1 EA MFC
O2 10 SLM 1 EA MFC
O2 5 SLM 1 EA MFC
O2 50 Sccm 1 EA MFC
H2 1 SLM 1EA MFC
H2 500 Sccm 3EA MFC

2007 vintage.
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