판매용 중고 RIGAKU 3640 XRF #157114

Wafer / Disk analyzer, 6"-8" 5 Standard elements for measuring: Ti, TiW(90/10), Au, TiW/Au (layer 1 TiW & layer 2 Au), Ti/Au(layer 1 Ti & layer 2 Au) Each correlation parts with (3) different thickness for measurement check Applied to semiconductor / drive IC front end process of bumping Configuration: Main body: Measuring stage with vacuum function by X-ray Main column and chamber Single chamber only Manual wafer transfer robot unit Display unit: Monitor shows statistic character on monitor Power transformer BOC EDWARDS IL70 dry pump Chiller: Yes Utilities: CDA N2 PCW Main M/C Holders, 6"-8" X-Ray tube Ti Goniometer Scanning goniometer Heat exchanger High voltage transformer Automatic voltage regulation Manual L/UL Control and vision system: Control system: PC Based with RS232 port Operation man-machine interface: Color touch panel, 18" Data collection: yes Facility and environment: Operation temperature: 15-25°C Relative humility: ≤75% N-2 for dry pump: Flow rate: 10 mL/min Pressure: 0.3~0.7 MPa (3~7kg/cm-2) Cooling water for heat exchange: Temperature: ≤ 30 °C Pressure: 0.2~0.4 MPa (2~4kg/cm2) Quality: City water Cooling water for dry pump: Flow rate: 3.5 L/min Temperature: ≤30°C Pressure: 0.2~0.4 MPa (2~4kg/cm2) Quality: City water (2) Operation manuals Installation instruction System module introduction Operation instructions Safety instructions (2) Repair and maintenance manuals PM Instructions Trouble shooting instructions Circuit diagram 208 VAC, 60 Hz, 3 Phase, 80A Currently warehoused 2003 vintage.