판매용 중고 ACCRETECH / TSK PG 300 RM #9165695

Wafer backside grinder, 12" (4) Chucks mounted to an indexing table system Auto cleaning unit Windows NT based operating system Rough grind station with thickness monitor Fine grind station with thickness monitor Integrated polish station with conditioning unit Graphical user interface (GUI) LCD Touch panel Frame laminating system Alignment system Front-side wafer de-taping system Backside OCR SEMI S2-93 Certified Options: By passable door interlock for PG, RM and slurry supply unit Pad thickness parameter: Allow up to 6 mm pad 2 Channel temperature control unit for cooling spindle Heating polish head In-line UV system Post process thickness measurement gauge DAF Tape laminator for Pre-cut tape (DAF / Dicing tape) (1) US Standard facility adapter kit OCR / BCR (RM unit) (3) BCR for Input carriers Interface: SECS / GEM 8" Notched wafer kit for PG300 8" Notched wafer kit for RM300 (2) 8" Wafer cassette / Frame adaptors Bar-code printer unit (9) Slot cassette capability Auto lot split capability Gas (With (2) cameras for street alignment) RFID For spinner chuck Missing parts: (1) Load port A (1) 12" H1 Arm (1) 12" H2 Pad (1) 12" Spinner table (1) 12" H4 Pad (1) 12" Mounting table (1) 12" Outer ring frame table (1) 12" Peeling table (2) Load Port bar code readers (2) PG Touch screen panels (1) CCD Camera and controller (1) Spinner LED (2) RM Pro-face monitors 2006 vintage.