판매용 중고 AMAT / APPLIED MATERIALS xR Leap #9174557

Ion implanter, 8" Main components: Processor module Beamline module Source services module Processor rack Heat exchanger / PDU Mobile PC & desk Clean room PC Enclosure Signal tower TEM Probe No VESDA smoke detector ISO TX Mains matching TX Beamline, controllers PSU's and assy: Pre accelerator / Mag controller Beamline inst Vacuum controller Post A controller Turbo controller Focus PSU Decel PSU A Mag PSU Pre A converter PSU Source mag PSU Suppression PSU Beam path components, source / Extraction / Flight tube / MRS and PFS assy: Source head type: IHC Extraction type: Dual bellows Flight tube MRS Pre defining PFS Type: HD PFS Gas cabinet (Source services): PH3 Module: SDS AsH3 Module: SDS Boron: HP Ar: HP Purge module PSU's, Controllers and assy: Gas and temperature control Filament PSU Arc PSU Bias PSU DPS Pre A HV stack G2 PSU & Components Vacuum system: Make / Model / Description SEIKO SEIKI / STP-1000 / Source turbo pump SEIKO SEIKI / STP-450 / MRS turbo pump CTI / OB-10 / Side cryo pump CTI / OB-10 / Rear cryo pump Processor PSU's controller and assy: Wheel & components Spin motor Gripper Transfer arm Clip actuator Blade A/B Sensor Tilt assy PFS DP Box Beam stop Beam profiler Filament PSU (PFS) Wafer loader / Mini environment assy: Carousel Indexer W/L Door Orientor Cassettes / Trays Arm servo PSU (XR80) Arm servo cont (XR80) ISO TX 9500 Post A: No HV stack No converter PSU No controller Control rack: DAQPDU Option chassis Target sys inst W/L Cont W/L Vacuum Ground PDU Target sys vacuum Spin / Scan cont Direct drive interface Plasma flood chassis Scan amp Spin amp Spin / Scan PDU Bleed resistor Motech 80 VME: CPU Main board Loop cont Energy level: 0.2-80 keV 1996 vintage.